7/19/2010	11:19:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2010	11:19:52 AM	Recipe started at 11:19 AM
7/19/2010	11:19:52 AM	H2 valve closed
7/19/2010	11:19:52 AM	BCl3 valve closed
7/19/2010	11:19:52 AM	PH3 valve closed
7/19/2010	11:19:52 AM	SiCl4 pre valve closed
7/19/2010	11:19:52 AM	SiCl4 post valve closed
7/19/2010	11:19:52 AM	Main Vac valve closed
7/19/2010	11:19:52 AM	Bypass valve closed
7/19/2010	11:19:52 AM	Bubbler valve closed
7/19/2010	11:19:52 AM	Helium valve opened
7/19/2010	11:19:52 AM	Helium MFC set to  500.000000
7/19/2010	11:19:52 AM	H2 MFC set to  0.000000
7/19/2010	11:19:52 AM	BCl3 MFC set to  0.000000
7/19/2010	11:19:52 AM	PHl3 MFC set to  0.000000
7/19/2010	11:19:52 AM	SiCl4 MFC set to  0.000000
7/19/2010	11:19:52 AM	Bypass solenoid MFC set to  0.000000
7/19/2010	11:19:52 AM	Tube furnace set to 0
7/19/2010	11:21:12 AM	Helium valve closed
7/19/2010	11:21:12 AM	H2 valve closed
7/19/2010	11:21:12 AM	BCl3 valve closed
7/19/2010	11:21:12 AM	PH3 valve closed
7/19/2010	11:21:12 AM	SiCl4 pre valve closed
7/19/2010	11:21:12 AM	SiCl4 post valve closed
7/19/2010	11:21:12 AM	Main Vac valve closed
7/19/2010	11:21:12 AM	Bypass valve closed
7/19/2010	11:21:12 AM	Bubbler valve closed
7/19/2010	11:21:12 AM	Helium MFC set to  0.000000
7/19/2010	11:21:12 AM	H2 MFC set to  0.000000
7/19/2010	11:21:12 AM	BCl3 MFC set to  0.000000
7/19/2010	11:21:12 AM	PHl3 MFC set to  0.000000
7/19/2010	11:21:12 AM	SiCl4 MFC set to  0.000000
7/19/2010	11:21:12 AM	Bypass solenoid MFC set to  0.000000
7/19/2010	11:21:12 AM	Tube furnace set to 0
7/19/2010	11:21:13 AM	Run finished at 11:21 AM
7/19/2010	11:21:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2010	11:43:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	11:43:49 AM	Recipe started at 11:43 AM
7/19/2010	11:43:49 AM	Helium valve closed
7/19/2010	11:43:49 AM	H2 valve closed
7/19/2010	11:43:49 AM	BCl3 valve closed
7/19/2010	11:43:49 AM	PH3 valve closed
7/19/2010	11:43:49 AM	SiCl4 pre valve closed
7/19/2010	11:43:49 AM	SiCl4 post valve closed
7/19/2010	11:43:49 AM	Main Vac valve closed
7/19/2010	11:43:49 AM	Bubbler valve closed
7/19/2010	11:43:49 AM	Bypass valve opened
7/19/2010	11:43:49 AM	Helium MFC set to  0.000000
7/19/2010	11:43:49 AM	H2 MFC set to  0.000000
7/19/2010	11:43:49 AM	BCl3 MFC set to  0.000000
7/19/2010	11:43:49 AM	PHl3 MFC set to  0.000000
7/19/2010	11:43:49 AM	SiCl4 MFC set to  0.000000
7/19/2010	11:43:49 AM	Bypass solenoid MFC set to  0.000000
7/19/2010	11:43:49 AM	Tube furnace set to 0
7/19/2010	11:50:09 AM	Run aborted at 11:50 AM
7/19/2010	11:50:09 AM	Helium valve closed
7/19/2010	11:50:09 AM	H2 valve closed
7/19/2010	11:50:09 AM	BCl3 valve closed
7/19/2010	11:50:09 AM	PH3 valve closed
7/19/2010	11:50:09 AM	SiCl4 pre valve closed
7/19/2010	11:50:09 AM	SiCl4 post valve closed
7/19/2010	11:50:09 AM	Bypass valve closed
7/19/2010	11:50:09 AM	Main Vac valve closed
7/19/2010	11:50:09 AM	Bubbler valve closed
7/19/2010	11:50:09 AM	Helium MFC set to  0.000000
7/19/2010	11:50:09 AM	H2 MFC set to  0.000000
7/19/2010	11:50:09 AM	BCl3 MFC set to  0.000000
7/19/2010	11:50:09 AM	PHl3 MFC set to  0.000000
7/19/2010	11:50:09 AM	SiCl4 MFC set to  0.000000
7/19/2010	11:50:09 AM	Tube furnace set to 0
7/19/2010	11:50:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	11:59:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	11:59:18 AM	Recipe started at 11:59 AM
7/19/2010	11:59:18 AM	Helium valve closed
7/19/2010	11:59:18 AM	H2 valve closed
7/19/2010	11:59:18 AM	BCl3 valve closed
7/19/2010	11:59:18 AM	PH3 valve closed
7/19/2010	11:59:18 AM	SiCl4 pre valve closed
7/19/2010	11:59:18 AM	SiCl4 post valve closed
7/19/2010	11:59:18 AM	Main Vac valve closed
7/19/2010	11:59:18 AM	Bubbler valve closed
7/19/2010	11:59:18 AM	Bypass valve opened
7/19/2010	11:59:18 AM	Helium MFC set to  0.000000
7/19/2010	11:59:18 AM	H2 MFC set to  0.000000
7/19/2010	11:59:18 AM	BCl3 MFC set to  0.000000
7/19/2010	11:59:18 AM	PHl3 MFC set to  0.000000
7/19/2010	11:59:18 AM	SiCl4 MFC set to  0.000000
7/19/2010	11:59:18 AM	Bypass solenoid MFC set to  0.000000
7/19/2010	11:59:18 AM	Tube furnace set to 0
7/19/2010	12:00:00 PM	Helium valve closed
7/19/2010	12:00:00 PM	H2 valve closed
7/19/2010	12:00:00 PM	BCl3 valve closed
7/19/2010	12:00:00 PM	PH3 valve closed
7/19/2010	12:00:00 PM	SiCl4 pre valve closed
7/19/2010	12:00:00 PM	SiCl4 post valve closed
7/19/2010	12:00:00 PM	Bubbler valve closed
7/19/2010	12:00:00 PM	Main Vac valve opened
7/19/2010	12:00:00 PM	Bypass valve opened
7/19/2010	12:00:00 PM	Helium MFC set to  0.000000
7/19/2010	12:00:00 PM	H2 MFC set to  0.000000
7/19/2010	12:00:00 PM	BCl3 MFC set to  0.000000
7/19/2010	12:00:00 PM	PHl3 MFC set to  0.000000
7/19/2010	12:00:00 PM	SiCl4 MFC set to  0.000000
7/19/2010	12:00:00 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	12:00:00 PM	Tube furnace set to 0
7/19/2010	12:00:00 PM	Run finished at 12:00 PM
7/19/2010	12:00:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	12:09:54 PM	Bypass valve closed
7/19/2010	12:09:54 PM	Main Vac valve closed
7/19/2010	12:10:06 PM	Bypass valve opened
7/19/2010	12:10:07 PM	Main Vac valve opened
7/19/2010	12:10:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/19/2010	12:10:37 PM	Recipe started at 12:10 PM
7/19/2010	12:10:37 PM	Helium valve closed
7/19/2010	12:10:37 PM	H2 valve closed
7/19/2010	12:10:37 PM	BCl3 valve closed
7/19/2010	12:10:37 PM	PH3 valve closed
7/19/2010	12:10:37 PM	SiCl4 pre valve closed
7/19/2010	12:10:37 PM	SiCl4 post valve closed
7/19/2010	12:10:37 PM	Main Vac valve closed
7/19/2010	12:10:37 PM	Bubbler valve closed
7/19/2010	12:10:37 PM	Bypass valve opened
7/19/2010	12:10:37 PM	Helium MFC set to  0.000000
7/19/2010	12:10:37 PM	H2 MFC set to  0.000000
7/19/2010	12:10:37 PM	BCl3 MFC set to  0.000000
7/19/2010	12:10:37 PM	PHl3 MFC set to  0.000000
7/19/2010	12:10:37 PM	SiCl4 MFC set to  0.000000
7/19/2010	12:10:37 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	12:10:37 PM	Tube furnace set to 0
7/19/2010	12:10:37 PM	Helium valve closed
7/19/2010	12:10:37 PM	H2 valve closed
7/19/2010	12:10:37 PM	BCl3 valve closed
7/19/2010	12:10:37 PM	PH3 valve closed
7/19/2010	12:10:37 PM	SiCl4 pre valve closed
7/19/2010	12:10:37 PM	SiCl4 post valve closed
7/19/2010	12:10:37 PM	Bubbler valve closed
7/19/2010	12:10:37 PM	Main Vac valve opened
7/19/2010	12:10:37 PM	Bypass valve opened
7/19/2010	12:10:37 PM	Helium MFC set to  0.000000
7/19/2010	12:10:37 PM	H2 MFC set to  0.000000
7/19/2010	12:10:37 PM	BCl3 MFC set to  0.000000
7/19/2010	12:10:37 PM	PHl3 MFC set to  0.000000
7/19/2010	12:10:37 PM	SiCl4 MFC set to  0.000000
7/19/2010	12:10:37 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	12:10:37 PM	Tube furnace set to 0
7/19/2010	12:10:47 PM	H2 valve closed
7/19/2010	12:10:47 PM	BCl3 valve closed
7/19/2010	12:10:47 PM	PH3 valve closed
7/19/2010	12:10:47 PM	SiCl4 pre valve closed
7/19/2010	12:10:47 PM	SiCl4 post valve closed
7/19/2010	12:10:47 PM	Bubbler valve closed
7/19/2010	12:10:47 PM	Helium valve opened
7/19/2010	12:10:47 PM	Main Vac valve opened
7/19/2010	12:10:47 PM	Bypass valve opened
7/19/2010	12:10:47 PM	Helium MFC set to  100.000000
7/19/2010	12:10:47 PM	H2 MFC set to  0.000000
7/19/2010	12:10:47 PM	BCl3 MFC set to  0.000000
7/19/2010	12:10:47 PM	PHl3 MFC set to  0.000000
7/19/2010	12:10:47 PM	SiCl4 MFC set to  0.000000
7/19/2010	12:10:47 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	12:10:47 PM	Tube furnace set to 0
7/19/2010	12:19:47 PM	Helium valve closed
7/19/2010	12:19:47 PM	H2 valve closed
7/19/2010	12:19:47 PM	BCl3 valve closed
7/19/2010	12:19:47 PM	PH3 valve closed
7/19/2010	12:19:47 PM	SiCl4 pre valve closed
7/19/2010	12:19:47 PM	SiCl4 post valve closed
7/19/2010	12:19:47 PM	Bubbler valve closed
7/19/2010	12:19:47 PM	Main Vac valve opened
7/19/2010	12:19:47 PM	Bypass valve opened
7/19/2010	12:19:47 PM	Helium MFC set to  0.000000
7/19/2010	12:19:47 PM	H2 MFC set to  0.000000
7/19/2010	12:19:47 PM	BCl3 MFC set to  0.000000
7/19/2010	12:19:47 PM	PHl3 MFC set to  0.000000
7/19/2010	12:19:47 PM	SiCl4 MFC set to  0.000000
7/19/2010	12:19:47 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	12:19:47 PM	Tube furnace set to 0
7/19/2010	12:20:47 PM	H2 valve closed
7/19/2010	12:20:47 PM	BCl3 valve closed
7/19/2010	12:20:47 PM	PH3 valve closed
7/19/2010	12:20:47 PM	SiCl4 pre valve closed
7/19/2010	12:20:47 PM	SiCl4 post valve closed
7/19/2010	12:20:47 PM	Bubbler valve closed
7/19/2010	12:20:47 PM	Helium valve opened
7/19/2010	12:20:47 PM	Main Vac valve opened
7/19/2010	12:20:47 PM	Bypass valve opened
7/19/2010	12:20:47 PM	Helium MFC set to  100.000000
7/19/2010	12:20:47 PM	H2 MFC set to  0.000000
7/19/2010	12:20:47 PM	BCl3 MFC set to  0.000000
7/19/2010	12:20:47 PM	PHl3 MFC set to  0.000000
7/19/2010	12:20:47 PM	SiCl4 MFC set to  0.000000
7/19/2010	12:20:47 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	12:20:47 PM	Tube furnace set to 0
7/19/2010	12:29:47 PM	Helium valve closed
7/19/2010	12:29:47 PM	H2 valve closed
7/19/2010	12:29:47 PM	BCl3 valve closed
7/19/2010	12:29:47 PM	PH3 valve closed
7/19/2010	12:29:47 PM	SiCl4 pre valve closed
7/19/2010	12:29:47 PM	SiCl4 post valve closed
7/19/2010	12:29:47 PM	Bubbler valve closed
7/19/2010	12:29:47 PM	Main Vac valve opened
7/19/2010	12:29:47 PM	Bypass valve opened
7/19/2010	12:29:47 PM	Helium MFC set to  0.000000
7/19/2010	12:29:47 PM	H2 MFC set to  0.000000
7/19/2010	12:29:47 PM	BCl3 MFC set to  0.000000
7/19/2010	12:29:47 PM	PHl3 MFC set to  0.000000
7/19/2010	12:29:47 PM	SiCl4 MFC set to  0.000000
7/19/2010	12:29:47 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	12:29:47 PM	Tube furnace set to 0
7/19/2010	12:30:47 PM	H2 valve closed
7/19/2010	12:30:47 PM	BCl3 valve closed
7/19/2010	12:30:47 PM	PH3 valve closed
7/19/2010	12:30:47 PM	SiCl4 pre valve closed
7/19/2010	12:30:47 PM	SiCl4 post valve closed
7/19/2010	12:30:47 PM	Bubbler valve closed
7/19/2010	12:30:47 PM	Helium valve opened
7/19/2010	12:30:47 PM	Main Vac valve opened
7/19/2010	12:30:47 PM	Bypass valve opened
7/19/2010	12:30:47 PM	Helium MFC set to  100.000000
7/19/2010	12:30:47 PM	H2 MFC set to  0.000000
7/19/2010	12:30:47 PM	BCl3 MFC set to  0.000000
7/19/2010	12:30:47 PM	PHl3 MFC set to  0.000000
7/19/2010	12:30:47 PM	SiCl4 MFC set to  0.000000
7/19/2010	12:30:47 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	12:30:48 PM	Tube furnace set to 0
7/19/2010	12:39:48 PM	Helium valve closed
7/19/2010	12:39:48 PM	H2 valve closed
7/19/2010	12:39:48 PM	BCl3 valve closed
7/19/2010	12:39:48 PM	PH3 valve closed
7/19/2010	12:39:48 PM	SiCl4 pre valve closed
7/19/2010	12:39:48 PM	SiCl4 post valve closed
7/19/2010	12:39:48 PM	Bubbler valve closed
7/19/2010	12:39:48 PM	Main Vac valve opened
7/19/2010	12:39:48 PM	Bypass valve opened
7/19/2010	12:39:48 PM	Helium MFC set to  0.000000
7/19/2010	12:39:48 PM	H2 MFC set to  0.000000
7/19/2010	12:39:48 PM	BCl3 MFC set to  0.000000
7/19/2010	12:39:48 PM	PHl3 MFC set to  0.000000
7/19/2010	12:39:48 PM	SiCl4 MFC set to  0.000000
7/19/2010	12:39:48 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	12:39:48 PM	Tube furnace set to 0
7/19/2010	12:39:49 PM	Run finished at 12:39 PM
7/19/2010	12:39:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/19/2010	1:13:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	1:13:55 PM	Recipe started at 1:13 PM
7/19/2010	1:13:55 PM	Helium valve closed
7/19/2010	1:13:55 PM	H2 valve closed
7/19/2010	1:13:55 PM	BCl3 valve closed
7/19/2010	1:13:55 PM	PH3 valve closed
7/19/2010	1:13:55 PM	SiCl4 pre valve closed
7/19/2010	1:13:55 PM	SiCl4 post valve closed
7/19/2010	1:13:55 PM	Main Vac valve closed
7/19/2010	1:13:55 PM	Bubbler valve closed
7/19/2010	1:13:55 PM	Bypass valve opened
7/19/2010	1:13:55 PM	Helium MFC set to  0.000000
7/19/2010	1:13:55 PM	H2 MFC set to  0.000000
7/19/2010	1:13:55 PM	BCl3 MFC set to  0.000000
7/19/2010	1:13:55 PM	PHl3 MFC set to  0.000000
7/19/2010	1:13:55 PM	SiCl4 MFC set to  0.000000
7/19/2010	1:13:55 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	1:13:55 PM	Tube furnace set to 0
7/19/2010	1:13:56 PM	Helium valve closed
7/19/2010	1:13:56 PM	H2 valve closed
7/19/2010	1:13:56 PM	BCl3 valve closed
7/19/2010	1:13:56 PM	PH3 valve closed
7/19/2010	1:13:56 PM	SiCl4 pre valve closed
7/19/2010	1:13:56 PM	SiCl4 post valve closed
7/19/2010	1:13:56 PM	Bubbler valve closed
7/19/2010	1:13:56 PM	Main Vac valve opened
7/19/2010	1:13:56 PM	Bypass valve opened
7/19/2010	1:13:56 PM	Helium MFC set to  0.000000
7/19/2010	1:13:56 PM	H2 MFC set to  0.000000
7/19/2010	1:13:56 PM	BCl3 MFC set to  0.000000
7/19/2010	1:13:56 PM	PHl3 MFC set to  0.000000
7/19/2010	1:13:56 PM	SiCl4 MFC set to  0.000000
7/19/2010	1:13:56 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	1:13:56 PM	Tube furnace set to 0
7/19/2010	1:13:56 PM	Run finished at 1:13 PM
7/19/2010	1:13:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	1:15:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/19/2010	1:15:27 PM	Recipe started at 1:15 PM
7/19/2010	1:15:28 PM	Helium valve closed
7/19/2010	1:15:28 PM	H2 valve closed
7/19/2010	1:15:28 PM	BCl3 valve closed
7/19/2010	1:15:28 PM	PH3 valve closed
7/19/2010	1:15:28 PM	SiCl4 pre valve closed
7/19/2010	1:15:28 PM	SiCl4 post valve closed
7/19/2010	1:15:28 PM	Main Vac valve closed
7/19/2010	1:15:28 PM	Bypass valve closed
7/19/2010	1:15:28 PM	Bubbler valve closed
7/19/2010	1:15:28 PM	Helium MFC set to  0.000000
7/19/2010	1:15:28 PM	H2 MFC set to  0.000000
7/19/2010	1:15:28 PM	BCl3 MFC set to  0.000000
7/19/2010	1:15:28 PM	PHl3 MFC set to  0.000000
7/19/2010	1:15:28 PM	SiCl4 MFC set to  0.000000
7/19/2010	1:15:28 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	1:15:28 PM	Tube furnace set to 0
7/19/2010	1:15:28 PM	Run finished at 1:15 PM
7/19/2010	1:15:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/19/2010	1:15:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	1:15:42 PM	Recipe started at 1:15 PM
7/19/2010	1:15:42 PM	Helium valve closed
7/19/2010	1:15:42 PM	H2 valve closed
7/19/2010	1:15:42 PM	BCl3 valve closed
7/19/2010	1:15:42 PM	PH3 valve closed
7/19/2010	1:15:42 PM	SiCl4 pre valve closed
7/19/2010	1:15:42 PM	SiCl4 post valve closed
7/19/2010	1:15:42 PM	Main Vac valve closed
7/19/2010	1:15:42 PM	Bubbler valve closed
7/19/2010	1:15:42 PM	Bypass valve opened
7/19/2010	1:15:42 PM	Helium MFC set to  0.000000
7/19/2010	1:15:42 PM	H2 MFC set to  0.000000
7/19/2010	1:15:42 PM	BCl3 MFC set to  0.000000
7/19/2010	1:15:42 PM	PHl3 MFC set to  0.000000
7/19/2010	1:15:42 PM	SiCl4 MFC set to  0.000000
7/19/2010	1:15:42 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	1:15:42 PM	Tube furnace set to 0
7/19/2010	1:15:43 PM	Helium valve closed
7/19/2010	1:15:43 PM	H2 valve closed
7/19/2010	1:15:43 PM	BCl3 valve closed
7/19/2010	1:15:43 PM	PH3 valve closed
7/19/2010	1:15:43 PM	SiCl4 pre valve closed
7/19/2010	1:15:43 PM	SiCl4 post valve closed
7/19/2010	1:15:43 PM	Bubbler valve closed
7/19/2010	1:15:43 PM	Main Vac valve opened
7/19/2010	1:15:43 PM	Bypass valve opened
7/19/2010	1:15:43 PM	Helium MFC set to  0.000000
7/19/2010	1:15:43 PM	H2 MFC set to  0.000000
7/19/2010	1:15:43 PM	BCl3 MFC set to  0.000000
7/19/2010	1:15:43 PM	PHl3 MFC set to  0.000000
7/19/2010	1:15:43 PM	SiCl4 MFC set to  0.000000
7/19/2010	1:15:43 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	1:15:43 PM	Tube furnace set to 0
7/19/2010	1:15:43 PM	Run finished at 1:15 PM
7/19/2010	1:15:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	1:18:55 PM	Recipe started at 1:18 PM
7/19/2010	1:18:55 PM	Helium valve closed
7/19/2010	1:18:55 PM	BCl3 valve closed
7/19/2010	1:18:55 PM	PH3 valve closed
7/19/2010	1:18:55 PM	SiCl4 pre valve closed
7/19/2010	1:18:55 PM	SiCl4 post valve closed
7/19/2010	1:18:55 PM	Main Vac valve closed
7/19/2010	1:18:55 PM	Bypass valve closed
7/19/2010	1:18:55 PM	Bubbler valve closed
7/19/2010	1:18:55 PM	H2 valve opened
7/19/2010	1:18:55 PM	Helium MFC set to  0.000000
7/19/2010	1:18:55 PM	H2 MFC set to  500.000000
7/19/2010	1:18:55 PM	BCl3 MFC set to  0.000000
7/19/2010	1:18:55 PM	PHl3 MFC set to  0.000000
7/19/2010	1:18:55 PM	SiCl4 MFC set to  0.000000
7/19/2010	1:18:55 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	1:18:55 PM	Tube furnace set to 0
7/19/2010	1:20:18 PM	Helium valve closed
7/19/2010	1:20:18 PM	BCl3 valve closed
7/19/2010	1:20:18 PM	PH3 valve closed
7/19/2010	1:20:18 PM	SiCl4 pre valve closed
7/19/2010	1:20:18 PM	SiCl4 post valve closed
7/19/2010	1:20:18 PM	Main Vac valve closed
7/19/2010	1:20:18 PM	Bypass valve closed
7/19/2010	1:20:18 PM	H2 valve opened
7/19/2010	1:20:18 PM	Bubbler valve opened
7/19/2010	1:20:18 PM	Helium MFC set to  0.000000
7/19/2010	1:20:18 PM	H2 MFC set to  500.000000
7/19/2010	1:20:18 PM	BCl3 MFC set to  0.000000
7/19/2010	1:20:18 PM	PHl3 MFC set to  0.000000
7/19/2010	1:20:18 PM	SiCl4 MFC set to  0.000000
7/19/2010	1:20:18 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	1:20:18 PM	Tube furnace set to 1000
7/19/2010	1:25:31 PM	Run aborted at 1:25 PM
7/19/2010	1:25:31 PM	Helium valve closed
7/19/2010	1:25:31 PM	H2 valve closed
7/19/2010	1:25:31 PM	BCl3 valve closed
7/19/2010	1:25:31 PM	PH3 valve closed
7/19/2010	1:25:31 PM	SiCl4 pre valve closed
7/19/2010	1:25:31 PM	SiCl4 post valve closed
7/19/2010	1:25:31 PM	Bypass valve closed
7/19/2010	1:25:31 PM	Main Vac valve closed
7/19/2010	1:25:31 PM	Bubbler valve closed
7/19/2010	1:25:31 PM	Helium MFC set to  0.000000
7/19/2010	1:25:31 PM	H2 MFC set to  0.000000
7/19/2010	1:25:31 PM	BCl3 MFC set to  0.000000
7/19/2010	1:25:31 PM	PHl3 MFC set to  0.000000
7/19/2010	1:25:31 PM	SiCl4 MFC set to  0.000000
7/19/2010	1:25:31 PM	Tube furnace set to 0
7/19/2010	1:26:28 PM	Recipe started at 1:26 PM
7/19/2010	1:26:28 PM	Helium valve closed
7/19/2010	1:26:28 PM	BCl3 valve closed
7/19/2010	1:26:28 PM	PH3 valve closed
7/19/2010	1:26:28 PM	SiCl4 pre valve closed
7/19/2010	1:26:28 PM	SiCl4 post valve closed
7/19/2010	1:26:28 PM	Main Vac valve closed
7/19/2010	1:26:28 PM	Bypass valve closed
7/19/2010	1:26:28 PM	Bubbler valve closed
7/19/2010	1:26:28 PM	H2 valve opened
7/19/2010	1:26:28 PM	Helium MFC set to  0.000000
7/19/2010	1:26:28 PM	H2 MFC set to  500.000000
7/19/2010	1:26:28 PM	BCl3 MFC set to  0.000000
7/19/2010	1:26:28 PM	PHl3 MFC set to  0.000000
7/19/2010	1:26:28 PM	SiCl4 MFC set to  0.000000
7/19/2010	1:26:28 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	1:26:28 PM	Tube furnace set to 0
7/19/2010	1:26:29 PM	Helium valve closed
7/19/2010	1:26:29 PM	BCl3 valve closed
7/19/2010	1:26:29 PM	PH3 valve closed
7/19/2010	1:26:29 PM	SiCl4 pre valve closed
7/19/2010	1:26:29 PM	SiCl4 post valve closed
7/19/2010	1:26:29 PM	Main Vac valve closed
7/19/2010	1:26:29 PM	Bypass valve closed
7/19/2010	1:26:29 PM	H2 valve opened
7/19/2010	1:26:29 PM	Bubbler valve opened
7/19/2010	1:26:29 PM	Helium MFC set to  0.000000
7/19/2010	1:26:29 PM	H2 MFC set to  500.000000
7/19/2010	1:26:29 PM	BCl3 MFC set to  0.000000
7/19/2010	1:26:29 PM	PHl3 MFC set to  0.000000
7/19/2010	1:26:29 PM	SiCl4 MFC set to  0.000000
7/19/2010	1:26:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	1:26:30 PM	Tube furnace set to 1000
7/19/2010	1:46:30 PM	Helium valve closed
7/19/2010	1:46:30 PM	PH3 valve closed
7/19/2010	1:46:30 PM	Main Vac valve closed
7/19/2010	1:46:30 PM	Bypass valve closed
7/19/2010	1:46:30 PM	H2 valve opened
7/19/2010	1:46:30 PM	BCl3 valve opened
7/19/2010	1:46:30 PM	SiCl4 pre valve opened
7/19/2010	1:46:30 PM	SiCl4 post valve opened
7/19/2010	1:46:30 PM	Bubbler valve opened
7/19/2010	1:46:30 PM	Helium MFC set to  0.000000
7/19/2010	1:46:30 PM	H2 MFC set to  500.000000
7/19/2010	1:46:30 PM	BCl3 MFC set to  35.000000
7/19/2010	1:46:30 PM	PHl3 MFC set to  0.000000
7/19/2010	1:46:30 PM	SiCl4 MFC set to  50.000000
7/19/2010	1:46:30 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	1:46:30 PM	Tube furnace set to 1000
7/19/2010	2:06:30 PM	H2 valve closed
7/19/2010	2:06:30 PM	BCl3 valve closed
7/19/2010	2:06:30 PM	PH3 valve closed
7/19/2010	2:06:30 PM	SiCl4 pre valve closed
7/19/2010	2:06:30 PM	SiCl4 post valve closed
7/19/2010	2:06:30 PM	Main Vac valve closed
7/19/2010	2:06:30 PM	Bypass valve closed
7/19/2010	2:06:30 PM	Helium valve opened
7/19/2010	2:06:30 PM	Bubbler valve opened
7/19/2010	2:06:30 PM	Helium MFC set to  500.000000
7/19/2010	2:06:30 PM	H2 MFC set to  0.000000
7/19/2010	2:06:30 PM	BCl3 MFC set to  0.000000
7/19/2010	2:06:30 PM	PHl3 MFC set to  0.000000
7/19/2010	2:06:30 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:06:30 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	2:06:30 PM	Tube furnace set to 0
7/19/2010	2:26:06 PM	Helium valve closed
7/19/2010	2:26:06 PM	H2 valve closed
7/19/2010	2:26:06 PM	BCl3 valve closed
7/19/2010	2:26:06 PM	PH3 valve closed
7/19/2010	2:26:06 PM	SiCl4 pre valve closed
7/19/2010	2:26:06 PM	SiCl4 post valve closed
7/19/2010	2:26:06 PM	Main Vac valve closed
7/19/2010	2:26:06 PM	Bubbler valve closed
7/19/2010	2:26:06 PM	Bypass valve closed
7/19/2010	2:26:06 PM	Helium MFC set to  0.000000
7/19/2010	2:26:06 PM	H2 MFC set to  0.000000
7/19/2010	2:26:06 PM	BCl3 MFC set to  0.000000
7/19/2010	2:26:06 PM	PHl3 MFC set to  0.000000
7/19/2010	2:26:06 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:26:06 PM	Bypass solenoid MFC set to  760.000000
7/19/2010	2:26:06 PM	Tube furnace set to 0
7/19/2010	2:26:06 PM	Baratron reads 741.318321 Torr.  Emergency exit.
7/19/2010	2:26:45 PM	Helium valve closed
7/19/2010	2:26:45 PM	H2 valve closed
7/19/2010	2:26:45 PM	BCl3 valve closed
7/19/2010	2:26:45 PM	PH3 valve closed
7/19/2010	2:26:45 PM	SiCl4 pre valve closed
7/19/2010	2:26:45 PM	SiCl4 post valve closed
7/19/2010	2:26:45 PM	Main Vac valve closed
7/19/2010	2:26:45 PM	Bypass valve closed
7/19/2010	2:26:45 PM	Bubbler valve closed
7/19/2010	2:26:45 PM	Helium MFC set to  0.000000
7/19/2010	2:26:45 PM	H2 MFC set to  0.000000
7/19/2010	2:26:45 PM	BCl3 MFC set to  0.000000
7/19/2010	2:26:45 PM	PHl3 MFC set to  0.000000
7/19/2010	2:26:45 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:26:45 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	2:26:46 PM	Tube furnace set to 0
7/19/2010	2:26:46 PM	Run finished at 2:26 PM
7/19/2010	2:36:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	2:36:15 PM	Recipe started at 2:36 PM
7/19/2010	2:36:15 PM	Helium valve closed
7/19/2010	2:36:15 PM	H2 valve closed
7/19/2010	2:36:15 PM	BCl3 valve closed
7/19/2010	2:36:15 PM	PH3 valve closed
7/19/2010	2:36:15 PM	SiCl4 pre valve closed
7/19/2010	2:36:15 PM	SiCl4 post valve closed
7/19/2010	2:36:15 PM	Main Vac valve closed
7/19/2010	2:36:15 PM	Bubbler valve closed
7/19/2010	2:36:15 PM	Bypass valve opened
7/19/2010	2:36:15 PM	Helium MFC set to  0.000000
7/19/2010	2:36:15 PM	H2 MFC set to  0.000000
7/19/2010	2:36:15 PM	BCl3 MFC set to  0.000000
7/19/2010	2:36:15 PM	PHl3 MFC set to  0.000000
7/19/2010	2:36:15 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:36:15 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	2:36:16 PM	Tube furnace set to 0
7/19/2010	2:36:51 PM	Helium valve closed
7/19/2010	2:36:51 PM	H2 valve closed
7/19/2010	2:36:51 PM	BCl3 valve closed
7/19/2010	2:36:51 PM	PH3 valve closed
7/19/2010	2:36:51 PM	SiCl4 pre valve closed
7/19/2010	2:36:51 PM	SiCl4 post valve closed
7/19/2010	2:36:51 PM	Bubbler valve closed
7/19/2010	2:36:51 PM	Main Vac valve opened
7/19/2010	2:36:51 PM	Bypass valve opened
7/19/2010	2:36:51 PM	Helium MFC set to  0.000000
7/19/2010	2:36:51 PM	H2 MFC set to  0.000000
7/19/2010	2:36:51 PM	BCl3 MFC set to  0.000000
7/19/2010	2:36:51 PM	PHl3 MFC set to  0.000000
7/19/2010	2:36:51 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:36:51 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	2:36:51 PM	Tube furnace set to 0
7/19/2010	2:36:51 PM	Run finished at 2:36 PM
7/19/2010	2:36:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	2:43:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/19/2010	2:43:44 PM	Recipe started at 2:43 PM
7/19/2010	2:43:44 PM	Helium valve closed
7/19/2010	2:43:44 PM	H2 valve closed
7/19/2010	2:43:44 PM	BCl3 valve closed
7/19/2010	2:43:44 PM	PH3 valve closed
7/19/2010	2:43:44 PM	SiCl4 pre valve closed
7/19/2010	2:43:44 PM	SiCl4 post valve closed
7/19/2010	2:43:44 PM	Main Vac valve closed
7/19/2010	2:43:44 PM	Bubbler valve closed
7/19/2010	2:43:44 PM	Bypass valve opened
7/19/2010	2:43:44 PM	Helium MFC set to  0.000000
7/19/2010	2:43:44 PM	H2 MFC set to  0.000000
7/19/2010	2:43:44 PM	BCl3 MFC set to  0.000000
7/19/2010	2:43:44 PM	PHl3 MFC set to  0.000000
7/19/2010	2:43:44 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:43:44 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	2:43:45 PM	Tube furnace set to 0
7/19/2010	2:43:45 PM	Helium valve closed
7/19/2010	2:43:45 PM	H2 valve closed
7/19/2010	2:43:45 PM	BCl3 valve closed
7/19/2010	2:43:45 PM	PH3 valve closed
7/19/2010	2:43:45 PM	SiCl4 pre valve closed
7/19/2010	2:43:45 PM	SiCl4 post valve closed
7/19/2010	2:43:45 PM	Bubbler valve closed
7/19/2010	2:43:45 PM	Main Vac valve opened
7/19/2010	2:43:45 PM	Bypass valve opened
7/19/2010	2:43:45 PM	Helium MFC set to  0.000000
7/19/2010	2:43:45 PM	H2 MFC set to  0.000000
7/19/2010	2:43:45 PM	BCl3 MFC set to  0.000000
7/19/2010	2:43:45 PM	PHl3 MFC set to  0.000000
7/19/2010	2:43:45 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:43:45 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	2:43:45 PM	Tube furnace set to 0
7/19/2010	2:44:45 PM	H2 valve closed
7/19/2010	2:44:45 PM	BCl3 valve closed
7/19/2010	2:44:45 PM	PH3 valve closed
7/19/2010	2:44:45 PM	SiCl4 pre valve closed
7/19/2010	2:44:45 PM	SiCl4 post valve closed
7/19/2010	2:44:45 PM	Bubbler valve closed
7/19/2010	2:44:45 PM	Helium valve opened
7/19/2010	2:44:45 PM	Main Vac valve opened
7/19/2010	2:44:45 PM	Bypass valve opened
7/19/2010	2:44:45 PM	Helium MFC set to  100.000000
7/19/2010	2:44:45 PM	H2 MFC set to  0.000000
7/19/2010	2:44:45 PM	BCl3 MFC set to  0.000000
7/19/2010	2:44:45 PM	PHl3 MFC set to  0.000000
7/19/2010	2:44:45 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:44:45 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	2:44:45 PM	Tube furnace set to 0
7/19/2010	2:51:37 PM	Run aborted at 2:51 PM
7/19/2010	2:51:37 PM	Helium valve closed
7/19/2010	2:51:37 PM	H2 valve closed
7/19/2010	2:51:37 PM	BCl3 valve closed
7/19/2010	2:51:37 PM	PH3 valve closed
7/19/2010	2:51:37 PM	SiCl4 pre valve closed
7/19/2010	2:51:37 PM	SiCl4 post valve closed
7/19/2010	2:51:37 PM	Bypass valve closed
7/19/2010	2:51:37 PM	Main Vac valve closed
7/19/2010	2:51:37 PM	Bubbler valve closed
7/19/2010	2:51:37 PM	Helium MFC set to  0.000000
7/19/2010	2:51:37 PM	H2 MFC set to  0.000000
7/19/2010	2:51:37 PM	BCl3 MFC set to  0.000000
7/19/2010	2:51:37 PM	PHl3 MFC set to  0.000000
7/19/2010	2:51:37 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:51:37 PM	Tube furnace set to 0
7/19/2010	2:51:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/19/2010	2:51:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	2:51:41 PM	Recipe started at 2:51 PM
7/19/2010	2:51:41 PM	Helium valve closed
7/19/2010	2:51:41 PM	H2 valve closed
7/19/2010	2:51:41 PM	BCl3 valve closed
7/19/2010	2:51:41 PM	PH3 valve closed
7/19/2010	2:51:41 PM	SiCl4 pre valve closed
7/19/2010	2:51:41 PM	SiCl4 post valve closed
7/19/2010	2:51:41 PM	Main Vac valve closed
7/19/2010	2:51:41 PM	Bubbler valve closed
7/19/2010	2:51:41 PM	Bypass valve opened
7/19/2010	2:51:41 PM	Helium MFC set to  0.000000
7/19/2010	2:51:41 PM	H2 MFC set to  0.000000
7/19/2010	2:51:41 PM	BCl3 MFC set to  0.000000
7/19/2010	2:51:41 PM	PHl3 MFC set to  0.000000
7/19/2010	2:51:41 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:51:41 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	2:51:41 PM	Tube furnace set to 0
7/19/2010	2:51:42 PM	Helium valve closed
7/19/2010	2:51:42 PM	H2 valve closed
7/19/2010	2:51:42 PM	BCl3 valve closed
7/19/2010	2:51:42 PM	PH3 valve closed
7/19/2010	2:51:42 PM	SiCl4 pre valve closed
7/19/2010	2:51:42 PM	SiCl4 post valve closed
7/19/2010	2:51:42 PM	Bubbler valve closed
7/19/2010	2:51:42 PM	Main Vac valve opened
7/19/2010	2:51:42 PM	Bypass valve opened
7/19/2010	2:51:42 PM	Helium MFC set to  0.000000
7/19/2010	2:51:42 PM	H2 MFC set to  0.000000
7/19/2010	2:51:42 PM	BCl3 MFC set to  0.000000
7/19/2010	2:51:42 PM	PHl3 MFC set to  0.000000
7/19/2010	2:51:42 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:51:42 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	2:51:42 PM	Tube furnace set to 0
7/19/2010	2:51:42 PM	Run finished at 2:51 PM
7/19/2010	2:51:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	2:54:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/19/2010	2:54:28 PM	Recipe started at 2:54 PM
7/19/2010	2:54:28 PM	Helium valve closed
7/19/2010	2:54:28 PM	H2 valve closed
7/19/2010	2:54:28 PM	BCl3 valve closed
7/19/2010	2:54:28 PM	PH3 valve closed
7/19/2010	2:54:28 PM	SiCl4 pre valve closed
7/19/2010	2:54:28 PM	SiCl4 post valve closed
7/19/2010	2:54:28 PM	Main Vac valve closed
7/19/2010	2:54:28 PM	Bypass valve closed
7/19/2010	2:54:28 PM	Bubbler valve closed
7/19/2010	2:54:28 PM	Helium MFC set to  0.000000
7/19/2010	2:54:28 PM	H2 MFC set to  0.000000
7/19/2010	2:54:28 PM	BCl3 MFC set to  0.000000
7/19/2010	2:54:28 PM	PHl3 MFC set to  0.000000
7/19/2010	2:54:28 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:54:28 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	2:54:29 PM	Tube furnace set to 0
7/19/2010	2:54:29 PM	Run finished at 2:54 PM
7/19/2010	2:54:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/19/2010	2:54:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	2:54:51 PM	Recipe started at 2:54 PM
7/19/2010	2:54:51 PM	Helium valve closed
7/19/2010	2:54:51 PM	H2 valve closed
7/19/2010	2:54:51 PM	BCl3 valve closed
7/19/2010	2:54:51 PM	PH3 valve closed
7/19/2010	2:54:51 PM	SiCl4 pre valve closed
7/19/2010	2:54:51 PM	SiCl4 post valve closed
7/19/2010	2:54:51 PM	Main Vac valve closed
7/19/2010	2:54:51 PM	Bubbler valve closed
7/19/2010	2:54:51 PM	Bypass valve opened
7/19/2010	2:54:51 PM	Helium MFC set to  0.000000
7/19/2010	2:54:51 PM	H2 MFC set to  0.000000
7/19/2010	2:54:51 PM	BCl3 MFC set to  0.000000
7/19/2010	2:54:51 PM	PHl3 MFC set to  0.000000
7/19/2010	2:54:51 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:54:51 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	2:54:52 PM	Tube furnace set to 0
7/19/2010	2:54:52 PM	Helium valve closed
7/19/2010	2:54:52 PM	H2 valve closed
7/19/2010	2:54:52 PM	BCl3 valve closed
7/19/2010	2:54:52 PM	PH3 valve closed
7/19/2010	2:54:52 PM	SiCl4 pre valve closed
7/19/2010	2:54:52 PM	SiCl4 post valve closed
7/19/2010	2:54:52 PM	Bubbler valve closed
7/19/2010	2:54:52 PM	Main Vac valve opened
7/19/2010	2:54:52 PM	Bypass valve opened
7/19/2010	2:54:52 PM	Helium MFC set to  0.000000
7/19/2010	2:54:52 PM	H2 MFC set to  0.000000
7/19/2010	2:54:52 PM	BCl3 MFC set to  0.000000
7/19/2010	2:54:52 PM	PHl3 MFC set to  0.000000
7/19/2010	2:54:52 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:54:52 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	2:54:52 PM	Tube furnace set to 0
7/19/2010	2:54:52 PM	Run finished at 2:54 PM
7/19/2010	2:54:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	2:55:29 PM	Recipe started at 2:55 PM
7/19/2010	2:55:29 PM	Helium valve closed
7/19/2010	2:55:29 PM	BCl3 valve closed
7/19/2010	2:55:29 PM	PH3 valve closed
7/19/2010	2:55:29 PM	SiCl4 pre valve closed
7/19/2010	2:55:29 PM	SiCl4 post valve closed
7/19/2010	2:55:29 PM	Main Vac valve closed
7/19/2010	2:55:29 PM	Bypass valve closed
7/19/2010	2:55:29 PM	Bubbler valve closed
7/19/2010	2:55:29 PM	H2 valve opened
7/19/2010	2:55:29 PM	Helium MFC set to  0.000000
7/19/2010	2:55:29 PM	H2 MFC set to  500.000000
7/19/2010	2:55:29 PM	BCl3 MFC set to  0.000000
7/19/2010	2:55:29 PM	PHl3 MFC set to  0.000000
7/19/2010	2:55:29 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:55:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	2:55:29 PM	Tube furnace set to 0
7/19/2010	2:56:49 PM	Helium valve closed
7/19/2010	2:56:49 PM	BCl3 valve closed
7/19/2010	2:56:49 PM	PH3 valve closed
7/19/2010	2:56:49 PM	SiCl4 pre valve closed
7/19/2010	2:56:49 PM	SiCl4 post valve closed
7/19/2010	2:56:49 PM	Main Vac valve closed
7/19/2010	2:56:49 PM	Bypass valve closed
7/19/2010	2:56:49 PM	H2 valve opened
7/19/2010	2:56:50 PM	Bubbler valve opened
7/19/2010	2:56:50 PM	Helium MFC set to  0.000000
7/19/2010	2:56:50 PM	H2 MFC set to  500.000000
7/19/2010	2:56:50 PM	BCl3 MFC set to  0.000000
7/19/2010	2:56:50 PM	PHl3 MFC set to  0.000000
7/19/2010	2:56:50 PM	SiCl4 MFC set to  0.000000
7/19/2010	2:56:50 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	2:56:50 PM	Tube furnace set to 1000
7/19/2010	3:16:50 PM	Helium valve closed
7/19/2010	3:16:50 PM	PH3 valve closed
7/19/2010	3:16:50 PM	Main Vac valve closed
7/19/2010	3:16:50 PM	Bypass valve closed
7/19/2010	3:16:50 PM	H2 valve opened
7/19/2010	3:16:50 PM	BCl3 valve opened
7/19/2010	3:16:50 PM	SiCl4 pre valve opened
7/19/2010	3:16:50 PM	SiCl4 post valve opened
7/19/2010	3:16:50 PM	Bubbler valve opened
7/19/2010	3:16:50 PM	Helium MFC set to  0.000000
7/19/2010	3:16:50 PM	H2 MFC set to  500.000000
7/19/2010	3:16:50 PM	BCl3 MFC set to  35.000000
7/19/2010	3:16:50 PM	PHl3 MFC set to  0.000000
7/19/2010	3:16:50 PM	SiCl4 MFC set to  50.000000
7/19/2010	3:16:50 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	3:16:50 PM	Tube furnace set to 1000
7/19/2010	3:36:50 PM	H2 valve closed
7/19/2010	3:36:50 PM	BCl3 valve closed
7/19/2010	3:36:50 PM	PH3 valve closed
7/19/2010	3:36:50 PM	SiCl4 pre valve closed
7/19/2010	3:36:50 PM	SiCl4 post valve closed
7/19/2010	3:36:50 PM	Main Vac valve closed
7/19/2010	3:36:50 PM	Bypass valve closed
7/19/2010	3:36:50 PM	Helium valve opened
7/19/2010	3:36:50 PM	Bubbler valve opened
7/19/2010	3:36:50 PM	Helium MFC set to  500.000000
7/19/2010	3:36:50 PM	H2 MFC set to  0.000000
7/19/2010	3:36:50 PM	BCl3 MFC set to  0.000000
7/19/2010	3:36:50 PM	PHl3 MFC set to  0.000000
7/19/2010	3:36:50 PM	SiCl4 MFC set to  0.000000
7/19/2010	3:36:50 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	3:36:50 PM	Tube furnace set to 0
7/19/2010	3:56:50 PM	Helium valve closed
7/19/2010	3:56:50 PM	H2 valve closed
7/19/2010	3:56:50 PM	BCl3 valve closed
7/19/2010	3:56:50 PM	PH3 valve closed
7/19/2010	3:56:50 PM	SiCl4 pre valve closed
7/19/2010	3:56:50 PM	SiCl4 post valve closed
7/19/2010	3:56:50 PM	Main Vac valve closed
7/19/2010	3:56:50 PM	Bypass valve closed
7/19/2010	3:56:50 PM	Bubbler valve closed
7/19/2010	3:56:50 PM	Helium MFC set to  0.000000
7/19/2010	3:56:50 PM	H2 MFC set to  0.000000
7/19/2010	3:56:50 PM	BCl3 MFC set to  0.000000
7/19/2010	3:56:50 PM	PHl3 MFC set to  0.000000
7/19/2010	3:56:50 PM	SiCl4 MFC set to  0.000000
7/19/2010	3:56:50 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	3:56:50 PM	Tube furnace set to 0
7/19/2010	3:56:50 PM	Run finished at 3:56 PM
7/19/2010	4:33:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	4:33:52 PM	Recipe started at 4:33 PM
7/19/2010	4:33:53 PM	Helium valve closed
7/19/2010	4:33:53 PM	H2 valve closed
7/19/2010	4:33:53 PM	BCl3 valve closed
7/19/2010	4:33:53 PM	PH3 valve closed
7/19/2010	4:33:53 PM	SiCl4 pre valve closed
7/19/2010	4:33:53 PM	SiCl4 post valve closed
7/19/2010	4:33:53 PM	Main Vac valve closed
7/19/2010	4:33:53 PM	Bubbler valve closed
7/19/2010	4:33:53 PM	Bypass valve opened
7/19/2010	4:33:53 PM	Helium MFC set to  0.000000
7/19/2010	4:33:53 PM	H2 MFC set to  0.000000
7/19/2010	4:33:53 PM	BCl3 MFC set to  0.000000
7/19/2010	4:33:53 PM	PHl3 MFC set to  0.000000
7/19/2010	4:33:53 PM	SiCl4 MFC set to  0.000000
7/19/2010	4:33:53 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	4:33:53 PM	Tube furnace set to 0
7/19/2010	4:34:29 PM	Helium valve closed
7/19/2010	4:34:29 PM	H2 valve closed
7/19/2010	4:34:29 PM	BCl3 valve closed
7/19/2010	4:34:29 PM	PH3 valve closed
7/19/2010	4:34:29 PM	SiCl4 pre valve closed
7/19/2010	4:34:29 PM	SiCl4 post valve closed
7/19/2010	4:34:29 PM	Bubbler valve closed
7/19/2010	4:34:29 PM	Main Vac valve opened
7/19/2010	4:34:29 PM	Bypass valve opened
7/19/2010	4:34:29 PM	Helium MFC set to  0.000000
7/19/2010	4:34:29 PM	H2 MFC set to  0.000000
7/19/2010	4:34:29 PM	BCl3 MFC set to  0.000000
7/19/2010	4:34:29 PM	PHl3 MFC set to  0.000000
7/19/2010	4:34:29 PM	SiCl4 MFC set to  0.000000
7/19/2010	4:34:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	4:34:29 PM	Tube furnace set to 0
7/19/2010	4:34:29 PM	Run finished at 4:34 PM
7/19/2010	4:34:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	4:35:34 PM	Helium valve opened
7/19/2010	4:35:43 PM	Helium MFC set to  100.000000
7/19/2010	4:37:21 PM	Helium valve closed
7/19/2010	4:37:48 PM	Helium valve opened
7/19/2010	4:38:44 PM	Helium valve closed
7/19/2010	4:39:27 PM	Helium valve opened
7/19/2010	4:40:17 PM	Helium valve closed
7/19/2010	4:40:56 PM	Helium valve opened
7/19/2010	4:41:59 PM	Helium valve closed
7/19/2010	4:42:48 PM	Helium valve opened
7/19/2010	4:43:35 PM	Helium valve closed
7/19/2010	4:44:21 PM	Helium valve opened
7/19/2010	4:51:03 PM	Helium valve closed
7/19/2010	4:51:46 PM	Helium valve opened
7/19/2010	4:52:47 PM	Helium valve closed
7/19/2010	4:54:08 PM	Recipe started at 4:54 PM
7/19/2010	4:54:08 PM	Helium valve closed
7/19/2010	4:54:08 PM	BCl3 valve closed
7/19/2010	4:54:08 PM	PH3 valve closed
7/19/2010	4:54:08 PM	SiCl4 pre valve closed
7/19/2010	4:54:08 PM	SiCl4 post valve closed
7/19/2010	4:54:08 PM	Main Vac valve closed
7/19/2010	4:54:08 PM	Bypass valve closed
7/19/2010	4:54:08 PM	Bubbler valve closed
7/19/2010	4:54:08 PM	H2 valve opened
7/19/2010	4:54:08 PM	Helium MFC set to  0.000000
7/19/2010	4:54:08 PM	H2 MFC set to  500.000000
7/19/2010	4:54:08 PM	BCl3 MFC set to  0.000000
7/19/2010	4:54:08 PM	PHl3 MFC set to  0.000000
7/19/2010	4:54:08 PM	SiCl4 MFC set to  0.000000
7/19/2010	4:54:08 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	4:54:09 PM	Tube furnace set to 0
7/19/2010	4:55:29 PM	Helium valve closed
7/19/2010	4:55:29 PM	BCl3 valve closed
7/19/2010	4:55:29 PM	PH3 valve closed
7/19/2010	4:55:29 PM	SiCl4 pre valve closed
7/19/2010	4:55:29 PM	SiCl4 post valve closed
7/19/2010	4:55:29 PM	Main Vac valve closed
7/19/2010	4:55:29 PM	Bypass valve closed
7/19/2010	4:55:29 PM	H2 valve opened
7/19/2010	4:55:29 PM	Bubbler valve opened
7/19/2010	4:55:29 PM	Helium MFC set to  0.000000
7/19/2010	4:55:29 PM	H2 MFC set to  500.000000
7/19/2010	4:55:29 PM	BCl3 MFC set to  0.000000
7/19/2010	4:55:29 PM	PHl3 MFC set to  0.000000
7/19/2010	4:55:29 PM	SiCl4 MFC set to  0.000000
7/19/2010	4:55:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	4:55:29 PM	Tube furnace set to 1000
7/19/2010	5:15:29 PM	Helium valve closed
7/19/2010	5:15:29 PM	PH3 valve closed
7/19/2010	5:15:29 PM	Main Vac valve closed
7/19/2010	5:15:29 PM	Bypass valve closed
7/19/2010	5:15:29 PM	H2 valve opened
7/19/2010	5:15:29 PM	BCl3 valve opened
7/19/2010	5:15:29 PM	SiCl4 pre valve opened
7/19/2010	5:15:29 PM	SiCl4 post valve opened
7/19/2010	5:15:29 PM	Bubbler valve opened
7/19/2010	5:15:29 PM	Helium MFC set to  0.000000
7/19/2010	5:15:29 PM	H2 MFC set to  500.000000
7/19/2010	5:15:29 PM	BCl3 MFC set to  35.000000
7/19/2010	5:15:29 PM	PHl3 MFC set to  0.000000
7/19/2010	5:15:29 PM	SiCl4 MFC set to  50.000000
7/19/2010	5:15:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	5:15:29 PM	Tube furnace set to 1000
7/19/2010	5:30:29 PM	H2 valve closed
7/19/2010	5:30:29 PM	BCl3 valve closed
7/19/2010	5:30:29 PM	PH3 valve closed
7/19/2010	5:30:29 PM	SiCl4 pre valve closed
7/19/2010	5:30:29 PM	SiCl4 post valve closed
7/19/2010	5:30:29 PM	Main Vac valve closed
7/19/2010	5:30:29 PM	Bypass valve closed
7/19/2010	5:30:29 PM	Helium valve opened
7/19/2010	5:30:29 PM	Bubbler valve opened
7/19/2010	5:30:29 PM	Helium MFC set to  500.000000
7/19/2010	5:30:29 PM	H2 MFC set to  0.000000
7/19/2010	5:30:29 PM	BCl3 MFC set to  0.000000
7/19/2010	5:30:29 PM	PHl3 MFC set to  0.000000
7/19/2010	5:30:29 PM	SiCl4 MFC set to  0.000000
7/19/2010	5:30:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	5:30:29 PM	Tube furnace set to 0
7/19/2010	5:50:29 PM	Helium valve closed
7/19/2010	5:50:29 PM	H2 valve closed
7/19/2010	5:50:29 PM	BCl3 valve closed
7/19/2010	5:50:29 PM	PH3 valve closed
7/19/2010	5:50:29 PM	SiCl4 pre valve closed
7/19/2010	5:50:29 PM	SiCl4 post valve closed
7/19/2010	5:50:29 PM	Main Vac valve closed
7/19/2010	5:50:29 PM	Bypass valve closed
7/19/2010	5:50:29 PM	Bubbler valve closed
7/19/2010	5:50:29 PM	Helium MFC set to  0.000000
7/19/2010	5:50:29 PM	H2 MFC set to  0.000000
7/19/2010	5:50:29 PM	BCl3 MFC set to  0.000000
7/19/2010	5:50:29 PM	PHl3 MFC set to  0.000000
7/19/2010	5:50:29 PM	SiCl4 MFC set to  0.000000
7/19/2010	5:50:29 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	5:50:30 PM	Tube furnace set to 0
7/19/2010	5:50:30 PM	Run finished at 5:50 PM
7/19/2010	5:55:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/19/2010	5:55:04 PM	Recipe started at 5:55 PM
7/19/2010	5:55:04 PM	Helium valve closed
7/19/2010	5:55:04 PM	H2 valve closed
7/19/2010	5:55:04 PM	BCl3 valve closed
7/19/2010	5:55:04 PM	PH3 valve closed
7/19/2010	5:55:04 PM	SiCl4 pre valve closed
7/19/2010	5:55:04 PM	SiCl4 post valve closed
7/19/2010	5:55:04 PM	Main Vac valve closed
7/19/2010	5:55:04 PM	Bypass valve closed
7/19/2010	5:55:04 PM	Bubbler valve closed
7/19/2010	5:55:04 PM	Helium MFC set to  0.000000
7/19/2010	5:55:04 PM	H2 MFC set to  0.000000
7/19/2010	5:55:04 PM	BCl3 MFC set to  0.000000
7/19/2010	5:55:04 PM	PHl3 MFC set to  0.000000
7/19/2010	5:55:04 PM	SiCl4 MFC set to  0.000000
7/19/2010	5:55:04 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	5:55:04 PM	Tube furnace set to 0
7/19/2010	5:55:05 PM	Run finished at 5:55 PM
7/19/2010	5:55:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/19/2010	6:21:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	6:21:54 PM	Recipe started at 6:21 PM
7/19/2010	6:21:54 PM	Helium valve closed
7/19/2010	6:21:54 PM	H2 valve closed
7/19/2010	6:21:54 PM	BCl3 valve closed
7/19/2010	6:21:54 PM	PH3 valve closed
7/19/2010	6:21:54 PM	SiCl4 pre valve closed
7/19/2010	6:21:54 PM	SiCl4 post valve closed
7/19/2010	6:21:54 PM	Main Vac valve closed
7/19/2010	6:21:54 PM	Bubbler valve closed
7/19/2010	6:21:54 PM	Bypass valve opened
7/19/2010	6:21:54 PM	Helium MFC set to  0.000000
7/19/2010	6:21:54 PM	H2 MFC set to  0.000000
7/19/2010	6:21:54 PM	BCl3 MFC set to  0.000000
7/19/2010	6:21:54 PM	PHl3 MFC set to  0.000000
7/19/2010	6:21:54 PM	SiCl4 MFC set to  0.000000
7/19/2010	6:21:54 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	6:21:55 PM	Tube furnace set to 0
7/19/2010	6:22:31 PM	Helium valve closed
7/19/2010	6:22:31 PM	H2 valve closed
7/19/2010	6:22:31 PM	BCl3 valve closed
7/19/2010	6:22:31 PM	PH3 valve closed
7/19/2010	6:22:31 PM	SiCl4 pre valve closed
7/19/2010	6:22:31 PM	SiCl4 post valve closed
7/19/2010	6:22:31 PM	Bubbler valve closed
7/19/2010	6:22:31 PM	Main Vac valve opened
7/19/2010	6:22:31 PM	Bypass valve opened
7/19/2010	6:22:31 PM	Helium MFC set to  0.000000
7/19/2010	6:22:31 PM	H2 MFC set to  0.000000
7/19/2010	6:22:31 PM	BCl3 MFC set to  0.000000
7/19/2010	6:22:31 PM	PHl3 MFC set to  0.000000
7/19/2010	6:22:31 PM	SiCl4 MFC set to  0.000000
7/19/2010	6:22:31 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	6:22:31 PM	Tube furnace set to 0
7/19/2010	6:22:32 PM	Run finished at 6:22 PM
7/19/2010	6:22:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	6:22:57 PM	Helium valve opened
7/19/2010	6:23:06 PM	Helium MFC set to  100.000000
7/19/2010	6:23:53 PM	Helium valve closed
7/19/2010	6:24:34 PM	Helium valve opened
7/19/2010	6:24:46 PM	Helium valve closed
7/19/2010	6:25:16 PM	Helium valve opened
7/19/2010	6:38:30 PM	Helium valve closed
7/19/2010	6:39:14 PM	Helium valve opened
7/19/2010	6:49:52 PM	Helium valve closed
7/19/2010	6:50:47 PM	Recipe started at 6:50 PM
7/19/2010	6:50:48 PM	Helium valve closed
7/19/2010	6:50:48 PM	BCl3 valve closed
7/19/2010	6:50:48 PM	PH3 valve closed
7/19/2010	6:50:48 PM	SiCl4 pre valve closed
7/19/2010	6:50:48 PM	SiCl4 post valve closed
7/19/2010	6:50:48 PM	Main Vac valve closed
7/19/2010	6:50:48 PM	Bypass valve closed
7/19/2010	6:50:48 PM	Bubbler valve closed
7/19/2010	6:50:48 PM	H2 valve opened
7/19/2010	6:50:48 PM	Helium MFC set to  0.000000
7/19/2010	6:50:48 PM	H2 MFC set to  500.000000
7/19/2010	6:50:48 PM	BCl3 MFC set to  0.000000
7/19/2010	6:50:48 PM	PHl3 MFC set to  0.000000
7/19/2010	6:50:48 PM	SiCl4 MFC set to  0.000000
7/19/2010	6:50:48 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	6:50:48 PM	Tube furnace set to 0
7/19/2010	6:52:10 PM	Helium valve closed
7/19/2010	6:52:10 PM	BCl3 valve closed
7/19/2010	6:52:10 PM	PH3 valve closed
7/19/2010	6:52:10 PM	SiCl4 pre valve closed
7/19/2010	6:52:10 PM	SiCl4 post valve closed
7/19/2010	6:52:10 PM	Main Vac valve closed
7/19/2010	6:52:10 PM	Bypass valve closed
7/19/2010	6:52:10 PM	H2 valve opened
7/19/2010	6:52:10 PM	Bubbler valve opened
7/19/2010	6:52:10 PM	Helium MFC set to  0.000000
7/19/2010	6:52:10 PM	H2 MFC set to  500.000000
7/19/2010	6:52:10 PM	BCl3 MFC set to  0.000000
7/19/2010	6:52:10 PM	PHl3 MFC set to  0.000000
7/19/2010	6:52:10 PM	SiCl4 MFC set to  0.000000
7/19/2010	6:52:10 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	6:52:10 PM	Tube furnace set to 1000
7/19/2010	7:12:10 PM	Helium valve closed
7/19/2010	7:12:10 PM	PH3 valve closed
7/19/2010	7:12:10 PM	Main Vac valve closed
7/19/2010	7:12:10 PM	Bypass valve closed
7/19/2010	7:12:10 PM	H2 valve opened
7/19/2010	7:12:10 PM	BCl3 valve opened
7/19/2010	7:12:10 PM	SiCl4 pre valve opened
7/19/2010	7:12:10 PM	SiCl4 post valve opened
7/19/2010	7:12:10 PM	Bubbler valve opened
7/19/2010	7:12:10 PM	Helium MFC set to  0.000000
7/19/2010	7:12:10 PM	H2 MFC set to  500.000000
7/19/2010	7:12:10 PM	BCl3 MFC set to  35.000000
7/19/2010	7:12:10 PM	PHl3 MFC set to  0.000000
7/19/2010	7:12:10 PM	SiCl4 MFC set to  50.000000
7/19/2010	7:12:10 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	7:12:10 PM	Tube furnace set to 1000
7/19/2010	7:32:10 PM	H2 valve closed
7/19/2010	7:32:10 PM	BCl3 valve closed
7/19/2010	7:32:10 PM	PH3 valve closed
7/19/2010	7:32:10 PM	SiCl4 pre valve closed
7/19/2010	7:32:10 PM	SiCl4 post valve closed
7/19/2010	7:32:10 PM	Main Vac valve closed
7/19/2010	7:32:10 PM	Bypass valve closed
7/19/2010	7:32:10 PM	Helium valve opened
7/19/2010	7:32:10 PM	Bubbler valve opened
7/19/2010	7:32:10 PM	Helium MFC set to  500.000000
7/19/2010	7:32:10 PM	H2 MFC set to  0.000000
7/19/2010	7:32:10 PM	BCl3 MFC set to  0.000000
7/19/2010	7:32:10 PM	PHl3 MFC set to  0.000000
7/19/2010	7:32:10 PM	SiCl4 MFC set to  0.000000
7/19/2010	7:32:10 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	7:32:10 PM	Tube furnace set to 0
7/19/2010	7:52:10 PM	Helium valve closed
7/19/2010	7:52:10 PM	H2 valve closed
7/19/2010	7:52:10 PM	BCl3 valve closed
7/19/2010	7:52:10 PM	PH3 valve closed
7/19/2010	7:52:10 PM	SiCl4 pre valve closed
7/19/2010	7:52:10 PM	SiCl4 post valve closed
7/19/2010	7:52:10 PM	Main Vac valve closed
7/19/2010	7:52:10 PM	Bypass valve closed
7/19/2010	7:52:10 PM	Bubbler valve closed
7/19/2010	7:52:10 PM	Helium MFC set to  0.000000
7/19/2010	7:52:10 PM	H2 MFC set to  0.000000
7/19/2010	7:52:10 PM	BCl3 MFC set to  0.000000
7/19/2010	7:52:10 PM	PHl3 MFC set to  0.000000
7/19/2010	7:52:10 PM	SiCl4 MFC set to  0.000000
7/19/2010	7:52:10 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	7:52:10 PM	Tube furnace set to 0
7/19/2010	7:52:11 PM	Run finished at 7:52 PM
7/19/2010	7:58:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	7:58:00 PM	Recipe started at 7:58 PM
7/19/2010	7:58:00 PM	Helium valve closed
7/19/2010	7:58:00 PM	H2 valve closed
7/19/2010	7:58:00 PM	BCl3 valve closed
7/19/2010	7:58:00 PM	PH3 valve closed
7/19/2010	7:58:00 PM	SiCl4 pre valve closed
7/19/2010	7:58:00 PM	SiCl4 post valve closed
7/19/2010	7:58:00 PM	Main Vac valve closed
7/19/2010	7:58:00 PM	Bubbler valve closed
7/19/2010	7:58:00 PM	Bypass valve opened
7/19/2010	7:58:00 PM	Helium MFC set to  0.000000
7/19/2010	7:58:00 PM	H2 MFC set to  0.000000
7/19/2010	7:58:00 PM	BCl3 MFC set to  0.000000
7/19/2010	7:58:00 PM	PHl3 MFC set to  0.000000
7/19/2010	7:58:00 PM	SiCl4 MFC set to  0.000000
7/19/2010	7:58:00 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	7:58:00 PM	Tube furnace set to 0
7/19/2010	7:58:34 PM	Helium valve closed
7/19/2010	7:58:34 PM	H2 valve closed
7/19/2010	7:58:34 PM	BCl3 valve closed
7/19/2010	7:58:34 PM	PH3 valve closed
7/19/2010	7:58:34 PM	SiCl4 pre valve closed
7/19/2010	7:58:34 PM	SiCl4 post valve closed
7/19/2010	7:58:34 PM	Bubbler valve closed
7/19/2010	7:58:34 PM	Main Vac valve opened
7/19/2010	7:58:34 PM	Bypass valve opened
7/19/2010	7:58:34 PM	Helium MFC set to  0.000000
7/19/2010	7:58:34 PM	H2 MFC set to  0.000000
7/19/2010	7:58:34 PM	BCl3 MFC set to  0.000000
7/19/2010	7:58:34 PM	PHl3 MFC set to  0.000000
7/19/2010	7:58:34 PM	SiCl4 MFC set to  0.000000
7/19/2010	7:58:34 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	7:58:34 PM	Tube furnace set to 0
7/19/2010	7:58:34 PM	Run finished at 7:58 PM
7/19/2010	7:58:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	8:01:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2010	8:01:57 PM	Recipe started at 8:01 PM
7/19/2010	8:01:57 PM	H2 valve closed
7/19/2010	8:01:57 PM	BCl3 valve closed
7/19/2010	8:01:57 PM	PH3 valve closed
7/19/2010	8:01:57 PM	SiCl4 pre valve closed
7/19/2010	8:01:57 PM	SiCl4 post valve closed
7/19/2010	8:01:57 PM	Main Vac valve closed
7/19/2010	8:01:57 PM	Bypass valve closed
7/19/2010	8:01:57 PM	Bubbler valve closed
7/19/2010	8:01:57 PM	Helium valve opened
7/19/2010	8:01:57 PM	Helium MFC set to  500.000000
7/19/2010	8:01:57 PM	H2 MFC set to  0.000000
7/19/2010	8:01:57 PM	BCl3 MFC set to  0.000000
7/19/2010	8:01:57 PM	PHl3 MFC set to  0.000000
7/19/2010	8:01:57 PM	SiCl4 MFC set to  0.000000
7/19/2010	8:01:57 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	8:01:57 PM	Tube furnace set to 0
7/19/2010	8:03:14 PM	Helium valve closed
7/19/2010	8:03:14 PM	H2 valve closed
7/19/2010	8:03:14 PM	BCl3 valve closed
7/19/2010	8:03:14 PM	PH3 valve closed
7/19/2010	8:03:14 PM	SiCl4 pre valve closed
7/19/2010	8:03:14 PM	SiCl4 post valve closed
7/19/2010	8:03:14 PM	Main Vac valve closed
7/19/2010	8:03:14 PM	Bypass valve closed
7/19/2010	8:03:14 PM	Bubbler valve closed
7/19/2010	8:03:14 PM	Helium MFC set to  0.000000
7/19/2010	8:03:14 PM	H2 MFC set to  0.000000
7/19/2010	8:03:14 PM	BCl3 MFC set to  0.000000
7/19/2010	8:03:14 PM	PHl3 MFC set to  0.000000
7/19/2010	8:03:14 PM	SiCl4 MFC set to  0.000000
7/19/2010	8:03:14 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	8:03:14 PM	Tube furnace set to 0
7/19/2010	8:03:14 PM	Run finished at 8:03 PM
7/19/2010	8:03:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/19/2010	8:07:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	8:07:09 PM	Recipe started at 8:07 PM
7/19/2010	8:07:09 PM	Helium valve closed
7/19/2010	8:07:09 PM	H2 valve closed
7/19/2010	8:07:09 PM	BCl3 valve closed
7/19/2010	8:07:09 PM	PH3 valve closed
7/19/2010	8:07:09 PM	SiCl4 pre valve closed
7/19/2010	8:07:09 PM	SiCl4 post valve closed
7/19/2010	8:07:09 PM	Main Vac valve closed
7/19/2010	8:07:09 PM	Bubbler valve closed
7/19/2010	8:07:09 PM	Bypass valve opened
7/19/2010	8:07:09 PM	Helium MFC set to  0.000000
7/19/2010	8:07:09 PM	H2 MFC set to  0.000000
7/19/2010	8:07:09 PM	BCl3 MFC set to  0.000000
7/19/2010	8:07:09 PM	PHl3 MFC set to  0.000000
7/19/2010	8:07:09 PM	SiCl4 MFC set to  0.000000
7/19/2010	8:07:09 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	8:07:09 PM	Tube furnace set to 0
7/19/2010	8:07:44 PM	Helium valve closed
7/19/2010	8:07:44 PM	H2 valve closed
7/19/2010	8:07:44 PM	BCl3 valve closed
7/19/2010	8:07:44 PM	PH3 valve closed
7/19/2010	8:07:44 PM	SiCl4 pre valve closed
7/19/2010	8:07:44 PM	SiCl4 post valve closed
7/19/2010	8:07:44 PM	Bubbler valve closed
7/19/2010	8:07:44 PM	Main Vac valve opened
7/19/2010	8:07:44 PM	Bypass valve opened
7/19/2010	8:07:44 PM	Helium MFC set to  0.000000
7/19/2010	8:07:44 PM	H2 MFC set to  0.000000
7/19/2010	8:07:44 PM	BCl3 MFC set to  0.000000
7/19/2010	8:07:44 PM	PHl3 MFC set to  0.000000
7/19/2010	8:07:44 PM	SiCl4 MFC set to  0.000000
7/19/2010	8:07:44 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	8:07:44 PM	Tube furnace set to 0
7/19/2010	8:07:44 PM	Run finished at 8:07 PM
7/19/2010	8:07:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	8:21:21 PM	Bypass valve closed
7/19/2010	8:21:21 PM	Main Vac valve closed
7/19/2010	8:21:26 PM	Main Vac valve opened
7/19/2010	8:21:27 PM	Bypass valve opened
7/19/2010	8:21:30 PM	Helium valve opened
7/19/2010	8:21:32 PM	Helium MFC set to  100.000000
7/19/2010	8:30:20 PM	Helium valve closed
7/19/2010	8:30:21 PM	Helium MFC set to  100.000000
7/19/2010	8:30:24 PM	Helium MFC set to  0.000000
7/19/2010	8:59:31 PM	Helium valve opened
7/19/2010	8:59:36 PM	Helium MFC set to  100.000000
7/19/2010	9:10:14 PM	Helium valve closed
7/19/2010	9:11:04 PM	Helium MFC set to  0.000000
7/19/2010	9:11:45 PM	Bypass valve closed
7/19/2010	9:11:46 PM	Main Vac valve closed
7/19/2010	9:11:52 PM	Bypass valve opened
7/19/2010	9:11:53 PM	Main Vac valve opened
7/19/2010	9:12:04 PM	Recipe started at 9:12 PM
7/19/2010	9:12:04 PM	Helium valve closed
7/19/2010	9:12:04 PM	BCl3 valve closed
7/19/2010	9:12:04 PM	PH3 valve closed
7/19/2010	9:12:04 PM	SiCl4 pre valve closed
7/19/2010	9:12:04 PM	SiCl4 post valve closed
7/19/2010	9:12:04 PM	Main Vac valve closed
7/19/2010	9:12:04 PM	Bypass valve closed
7/19/2010	9:12:04 PM	Bubbler valve closed
7/19/2010	9:12:04 PM	H2 valve opened
7/19/2010	9:12:04 PM	Helium MFC set to  0.000000
7/19/2010	9:12:04 PM	H2 MFC set to  500.000000
7/19/2010	9:12:04 PM	BCl3 MFC set to  0.000000
7/19/2010	9:12:04 PM	PHl3 MFC set to  0.000000
7/19/2010	9:12:04 PM	SiCl4 MFC set to  0.000000
7/19/2010	9:12:04 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	9:12:05 PM	Tube furnace set to 0
7/19/2010	9:13:24 PM	Helium valve closed
7/19/2010	9:13:24 PM	BCl3 valve closed
7/19/2010	9:13:24 PM	PH3 valve closed
7/19/2010	9:13:24 PM	SiCl4 pre valve closed
7/19/2010	9:13:24 PM	SiCl4 post valve closed
7/19/2010	9:13:24 PM	Main Vac valve closed
7/19/2010	9:13:24 PM	Bypass valve closed
7/19/2010	9:13:24 PM	H2 valve opened
7/19/2010	9:13:24 PM	Bubbler valve opened
7/19/2010	9:13:24 PM	Helium MFC set to  0.000000
7/19/2010	9:13:24 PM	H2 MFC set to  500.000000
7/19/2010	9:13:24 PM	BCl3 MFC set to  0.000000
7/19/2010	9:13:24 PM	PHl3 MFC set to  0.000000
7/19/2010	9:13:24 PM	SiCl4 MFC set to  0.000000
7/19/2010	9:13:24 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	9:13:25 PM	Tube furnace set to 1000
7/19/2010	9:22:10 PM	Helium valve closed
7/19/2010	9:22:10 PM	PH3 valve closed
7/19/2010	9:22:10 PM	Main Vac valve closed
7/19/2010	9:22:10 PM	Bypass valve closed
7/19/2010	9:22:10 PM	H2 valve opened
7/19/2010	9:22:10 PM	BCl3 valve opened
7/19/2010	9:22:10 PM	SiCl4 pre valve opened
7/19/2010	9:22:10 PM	SiCl4 post valve opened
7/19/2010	9:22:10 PM	Bubbler valve opened
7/19/2010	9:22:10 PM	Helium MFC set to  0.000000
7/19/2010	9:22:10 PM	H2 MFC set to  500.000000
7/19/2010	9:22:10 PM	BCl3 MFC set to  15.000000
7/19/2010	9:22:10 PM	PHl3 MFC set to  0.000000
7/19/2010	9:22:10 PM	SiCl4 MFC set to  50.000000
7/19/2010	9:22:10 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	9:22:10 PM	Tube furnace set to 1000
7/19/2010	9:25:42 PM	Helium valve closed
7/19/2010	9:25:42 PM	PH3 valve closed
7/19/2010	9:25:42 PM	Main Vac valve closed
7/19/2010	9:25:42 PM	Bypass valve closed
7/19/2010	9:25:42 PM	H2 valve opened
7/19/2010	9:25:42 PM	BCl3 valve opened
7/19/2010	9:25:42 PM	SiCl4 pre valve opened
7/19/2010	9:25:42 PM	SiCl4 post valve opened
7/19/2010	9:25:42 PM	Bubbler valve opened
7/19/2010	9:25:42 PM	Helium MFC set to  0.000000
7/19/2010	9:25:42 PM	H2 MFC set to  500.000000
7/19/2010	9:25:42 PM	BCl3 MFC set to  15.000000
7/19/2010	9:25:42 PM	PHl3 MFC set to  0.000000
7/19/2010	9:25:42 PM	SiCl4 MFC set to  50.000000
7/19/2010	9:25:42 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	9:25:42 PM	Tube furnace set to 1000
7/19/2010	9:30:42 PM	H2 valve closed
7/19/2010	9:30:42 PM	BCl3 valve closed
7/19/2010	9:30:42 PM	PH3 valve closed
7/19/2010	9:30:42 PM	SiCl4 pre valve closed
7/19/2010	9:30:42 PM	SiCl4 post valve closed
7/19/2010	9:30:42 PM	Main Vac valve closed
7/19/2010	9:30:42 PM	Bypass valve closed
7/19/2010	9:30:42 PM	Helium valve opened
7/19/2010	9:30:42 PM	Bubbler valve opened
7/19/2010	9:30:42 PM	Helium MFC set to  500.000000
7/19/2010	9:30:42 PM	H2 MFC set to  0.000000
7/19/2010	9:30:42 PM	BCl3 MFC set to  0.000000
7/19/2010	9:30:42 PM	PHl3 MFC set to  0.000000
7/19/2010	9:30:42 PM	SiCl4 MFC set to  0.000000
7/19/2010	9:30:42 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	9:30:43 PM	Tube furnace set to 0
7/19/2010	9:50:43 PM	Helium valve closed
7/19/2010	9:50:43 PM	H2 valve closed
7/19/2010	9:50:43 PM	BCl3 valve closed
7/19/2010	9:50:43 PM	PH3 valve closed
7/19/2010	9:50:43 PM	SiCl4 pre valve closed
7/19/2010	9:50:43 PM	SiCl4 post valve closed
7/19/2010	9:50:43 PM	Main Vac valve closed
7/19/2010	9:50:43 PM	Bypass valve closed
7/19/2010	9:50:43 PM	Bubbler valve closed
7/19/2010	9:50:43 PM	Helium MFC set to  0.000000
7/19/2010	9:50:43 PM	H2 MFC set to  0.000000
7/19/2010	9:50:43 PM	BCl3 MFC set to  0.000000
7/19/2010	9:50:43 PM	PHl3 MFC set to  0.000000
7/19/2010	9:50:43 PM	SiCl4 MFC set to  0.000000
7/19/2010	9:50:43 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	9:50:43 PM	Tube furnace set to 0
7/19/2010	9:50:43 PM	Run finished at 9:50 PM
7/19/2010	9:58:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/19/2010	9:58:41 PM	Recipe started at 9:58 PM
7/19/2010	9:58:42 PM	Helium valve closed
7/19/2010	9:58:42 PM	H2 valve closed
7/19/2010	9:58:42 PM	BCl3 valve closed
7/19/2010	9:58:42 PM	PH3 valve closed
7/19/2010	9:58:42 PM	SiCl4 pre valve closed
7/19/2010	9:58:42 PM	SiCl4 post valve closed
7/19/2010	9:58:42 PM	Main Vac valve closed
7/19/2010	9:58:42 PM	Bubbler valve closed
7/19/2010	9:58:42 PM	Bypass valve opened
7/19/2010	9:58:42 PM	Helium MFC set to  0.000000
7/19/2010	9:58:42 PM	H2 MFC set to  0.000000
7/19/2010	9:58:42 PM	BCl3 MFC set to  0.000000
7/19/2010	9:58:42 PM	PHl3 MFC set to  0.000000
7/19/2010	9:58:42 PM	SiCl4 MFC set to  0.000000
7/19/2010	9:58:42 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	9:58:42 PM	Tube furnace set to 0
7/19/2010	9:59:17 PM	Helium valve closed
7/19/2010	9:59:17 PM	H2 valve closed
7/19/2010	9:59:17 PM	BCl3 valve closed
7/19/2010	9:59:17 PM	PH3 valve closed
7/19/2010	9:59:17 PM	SiCl4 pre valve closed
7/19/2010	9:59:17 PM	SiCl4 post valve closed
7/19/2010	9:59:17 PM	Bubbler valve closed
7/19/2010	9:59:17 PM	Main Vac valve opened
7/19/2010	9:59:17 PM	Bypass valve opened
7/19/2010	9:59:17 PM	Helium MFC set to  0.000000
7/19/2010	9:59:17 PM	H2 MFC set to  0.000000
7/19/2010	9:59:17 PM	BCl3 MFC set to  0.000000
7/19/2010	9:59:17 PM	PHl3 MFC set to  0.000000
7/19/2010	9:59:17 PM	SiCl4 MFC set to  0.000000
7/19/2010	9:59:17 PM	Bypass solenoid MFC set to  0.000000
7/19/2010	9:59:17 PM	Tube furnace set to 0
7/19/2010	9:59:17 PM	Run finished at 9:59 PM
7/19/2010	9:59:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
